JPH0623570Y2 - プラズマ発生装置 - Google Patents

プラズマ発生装置

Info

Publication number
JPH0623570Y2
JPH0623570Y2 JP10998588U JP10998588U JPH0623570Y2 JP H0623570 Y2 JPH0623570 Y2 JP H0623570Y2 JP 10998588 U JP10998588 U JP 10998588U JP 10998588 U JP10998588 U JP 10998588U JP H0623570 Y2 JPH0623570 Y2 JP H0623570Y2
Authority
JP
Japan
Prior art keywords
sample
microwave
plasma
wave circuit
slow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10998588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0233261U (en]
Inventor
公平 大竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP10998588U priority Critical patent/JPH0623570Y2/ja
Publication of JPH0233261U publication Critical patent/JPH0233261U/ja
Application granted granted Critical
Publication of JPH0623570Y2 publication Critical patent/JPH0623570Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP10998588U 1988-08-24 1988-08-24 プラズマ発生装置 Expired - Lifetime JPH0623570Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998588U JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998588U JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Publications (2)

Publication Number Publication Date
JPH0233261U JPH0233261U (en]) 1990-03-01
JPH0623570Y2 true JPH0623570Y2 (ja) 1994-06-22

Family

ID=31346731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998588U Expired - Lifetime JPH0623570Y2 (ja) 1988-08-24 1988-08-24 プラズマ発生装置

Country Status (1)

Country Link
JP (1) JPH0623570Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627871A (ja) * 1992-07-06 1994-02-04 Mitsuru Ito 自動車の運転操作練習台

Also Published As

Publication number Publication date
JPH0233261U (en]) 1990-03-01

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